Partner Product / Failure Analysis Tools

Failure-Analysis Polishing & Etching Tools

Polishing and etching sample-preparation equipment for the failure and defect analysis of semiconductor devices.

Our Partner

SUNYOU (Sanyu Seisakusho Co., Ltd.)

Failure Analysis Tools & Precision Equipment

About SUNYOU (Sanyu Seisakusho)

SUNYOU (Sanyu Seisakusho Co., Ltd.) is a manufacturing company headquartered in Hitachiota, Ibaraki, Japan. Its core business is the development and manufacture of polishing equipment and plasma etching systems for semiconductor failure analysis, with an integrated production system spanning design, machining, and assembly.

ATE Service Corporation handles product introductions, selection, and deployment consultations for SUNYOU's semiconductor failure-analysis products. Please check the SUNYOU official website for the latest product information.

Polishing Equipment

Mechanical package opening and polishing, including localized layer exposure.

SUNYOU Localized Semiconductor Device Polisher DG300

Localized Semiconductor Device Polisher

Creates a localized, bowl-shaped depression by dimple grinding to help expose layers in semiconductor devices.

  • Integrated microscope for on-the-spot adjustment and inspection
  • Localized polishing with a rotating sample stage and wheel
  • Sample preparation for semiconductor failure analysis and materials research
Product Details & Resources ↗

Manufacturer website (Japanese)

SUNYOU Precision Polishing System AP-1000

Precision Polishing System

Handles semiconductor package opening as well as subsequent milling and polishing.

  • Accommodates wafers up to 4 inches
  • Select processing positions and areas using camera images
  • Automatic tilt correction and processing recipe storage and recall
Product Details & Resources ↗

Manufacturer website (Japanese)

Plasma Etching Systems

Solutions for localized processing, sample preparation, and Minimal Fab etching.

SUNYOU Benchtop Plasma Etching System TP-50B

Benchtop Plasma Etching System

Uses suction plasma for applications ranging from exposing interconnects in failure-analysis samples to surface modification and cleaning.

  • Localized plasma processing from 0.5 mm in diameter
  • Direct removal of reaction products helps reduce residue
  • Stage movement enables processing over larger areas
Product Details & Resources ↗

Manufacturer website (Japanese)

SUNYOU Minimal Micro-Plasma Etching System Minimal Fab

Minimal Micro-Plasma Etching System

A general-purpose etcher incorporating micro-plasma technology for Minimal Fab systems using half-inch wafers.

  • Stable plasma generation with a compact, low-power supply
  • Supports multiple processing steps
  • XY scanning helps achieve uniform etching across the wafer
Product Details & Resources ↗

Manufacturer website (Japanese)

Find the right equipment for your samples and processing needs

Tell us about your materials, sample dimensions, and package-opening, polishing, or etching requirements. ATE Service can assist with product selection and introduction. For detailed specifications, application examples, and catalogs, visit the manufacturer's product pages.

Contact ATE Service

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